Friction and Wear Properties of ALD Coated MEMS

MRS Proceedings 2004 Vol. 841

Friction and Wear Properties of ALD Coated MEMS

Nistorica, Corina, Gory, Igor, Skidmore, George D., Mantiziba, Fadziso M., Gnade, Bruce E.
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Volume:
841
Year:
2004
Language:
english
Pages:
1
DOI:
10.1557/proc-841-r9.16
File:
PDF, 1.47 MB
english, 2004
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