Local stress determination in shallow trench insulator...

Local stress determination in shallow trench insulator structures with one-side and two-sides pad-SiN layer by polarized micro-Raman spectroscopy extraction and mechanical modelization

Liao, Milton M. H.
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Volume:
105
Year:
2009
Language:
english
DOI:
10.1063/1.3116531
File:
PDF, 517 KB
english, 2009
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