Growth mechanism of thin silicon oxide films on Si(100) studied by medium-energy ion scattering
Gusev, E., Lu, H., Gustafsson, T., Garfunkel, E.Volume:
52
Year:
1995
Language:
english
Pages:
17
DOI:
10.1103/physrevb.52.1759
File:
PDF, 851 KB
english, 1995