[IEEE 2012 23rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2012.05.15-2012.05.17)] 2012 SEMI Advanced Semiconductor Manufacturing Conference - A predictive maintenance system based on regularization methods for ion-implantation
Susto, G. A., Schirru, A., Pampuri, S., Beghi, A.Year:
2012
Language:
english
Pages:
6
DOI:
10.1109/asmc.2012.6212884
File:
PDF, 959 KB
english, 2012