![](/img/cover-not-exists.png)
[IEEE 2012 23rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY (2012.05.15-2012.05.17)] 2012 SEMI Advanced Semiconductor Manufacturing Conference - Carbonized surface curing for etch-back process
Sungjin Jang,, In-cheol Kim,, Kyu-yeol Lee,, Soo-cheol Lee,, In-soo Cho,, Byoung-deog Choi,Year:
2012
Language:
english
Pages:
2
DOI:
10.1109/asmc.2012.6212891
File:
PDF, 394 KB
english, 2012