Establishment of a Near-Field Photolithography Processing...

Journal of Computational and Theoretical Nanoscience 2011 Vol. 8; Iss. 7

Establishment of a Near-Field Photolithography Processing Experiment Prediction Model and Parameter Optimization Model

Lin, Zone-Ching, Yang, Ching-Been
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Volume:
8
Year:
2011
Language:
english
Pages:
10
DOI:
10.1166/jctn.2011.1797
File:
PDF, 795 KB
english, 2011
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