Obtaining a high area ratio free-standing silicon...

Journal of Micromechanics and Microengineering 2008 Vol. 18; Iss. 3

Obtaining a high area ratio free-standing silicon microchannel plate via a modified electrochemical procedure

Chen, Xiaoming, Lin, Jilei, Yuan, Ding, Ci, Pengliang, Xin, Peisheng, Xu, Shaohui, Wang, Lianwei
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Volume:
18
Year:
2008
Language:
english
DOI:
10.1088/0960-1317/18/3/037003
File:
PDF, 600 KB
english, 2008
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