Observations of the influence of threading dislocations on the recombination enhanced partial dislocation glide in 4H-silicon carbide epitaxial layers
Chen, Y., Dudley, M., Liu, K. X., Stahlbush, R. E.Volume:
90
Year:
2007
Language:
english
DOI:
10.1063/1.2734499
File:
PDF, 528 KB
english, 2007