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SPIE Proceedings [SPIE Lightmetry - Pultusk, Poland (Monday 5 June 2000)] Lightmetry: Metrology, Spectroscopy, and Testing Techniques Using Light - Spectroscopic ellipsometry investigation of influence of high-pressure high-temperature process on optical properties of SiO2-Si structures
Rzodkiewicz, Witold, Kudla, Andrzej, Misiuk, Andrzej, Lasisz, Stanislaw, Pluta, MaksymilianVolume:
4517
Year:
2001
Language:
english
Pages:
6
DOI:
10.1117/12.435963
File:
PDF, 366 KB
english, 2001