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[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - The development of novel surface acoustic wave MEMS-IDT gyroscope based on standing wave mode
Oh, Haekwan, Lee, Keekeun, Yang, SangsikYear:
2009
Language:
english
Pages:
4
DOI:
10.1109/sensor.2009.5285909
File:
PDF, 1.49 MB
english, 2009