Dynamics of the Drying Defects Left by Residual Ultra-Pure...

ECS Journal of Solid State Science and Technology 2012 / 01 Vol. 1; Iss. 1

Dynamics of the Drying Defects Left by Residual Ultra-Pure Water Droplets on Silicon Substrate

Belmiloud, N., Tamaddon, A. H., Mertens, P. W., Struyf, H., Xu, X.
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Volume:
1
Language:
english
Pages:
1
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.014201jss
Date:
January, 2012
File:
PDF, 889 KB
english, 2012
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