Frequency response of in-plane coupled resonators for...

Microsystem Technologies 2012 / 06 Vol. 18; Iss. 6

Frequency response of in-plane coupled resonators for investigating the acceleration sensitivity of MEMS tuning fork gyroscopes

Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
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Volume:
18
Language:
english
Pages:
7
DOI:
10.1007/s00542-012-1510-4
Date:
June, 2012
File:
PDF, 790 KB
english, 2012
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