SPIE Proceedings [SPIE SPIE Optical Systems Design - Marseille, France (Monday 5 September 2011)] Advances in Optical Thin Films IV - Mg-based multilayers and their thermal stabilities for EUV range
Zhu, Jingtao, Zhou, Sika, Li, Haochuan, Huang, Qiushi, Jiang, Li, Wang, Fengli, Zhang, Zhong, Wang, Zhanshan, Zhou, Hongjun, Huo, Tonglin, Lequime, Michel, Macleod, H. Angus, Ristau, DetlevVolume:
8168
Year:
2011
Language:
english
Pages:
1
DOI:
10.1117/12.896405
File:
PDF, 512 KB
english, 2011