A lateral-axis micromachined tuning fork gyroscope with...

Journal of Micromechanics and Microengineering 2010 Vol. 20; Iss. 2

A lateral-axis micromachined tuning fork gyroscope with torsional Z-sensing and electrostatic force-balanced driving

Guo, Z Y, Yang, Z C, Zhao, Q C, Lin, L T, Ding, H T, Liu, X S, Cui, J, Xie, H, Yan, G Z
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Volume:
20
Year:
2010
Language:
english
DOI:
10.1088/0960-1317/20/2/025007
File:
PDF, 846 KB
english, 2010
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