[IEEE 2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) - Taipei, Taiwan (2011.10.19-2011.10.21)] 2011 6th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) - A fully integrated circuit for MEMS vibrating gyroscope using standard 0.25um CMOS process
Chiu, Sheng-Ren, Sue, Chung-Yang, Liao, Lu-Pu, Teng, Li-Tao, Hsu, Yu-Wen, Su, Yan-KuinYear:
2011
Language:
english
Pages:
4
DOI:
10.1109/impact.2011.6117258
File:
PDF, 1.06 MB
english, 2011