![](/img/cover-not-exists.png)
[IEEE 2011 23rd International Conference on Microelectronics (ICM) - Hammamet, Tunisia (2011.12.19-2011.12.22)] ICM 2011 Proceeding - A 5 V MEMS gyroscope with 3 aF/°/s sensitivity, 0.6 °/√hr mechanical noise and drive-sense crosstalk minimization
Elsayed, Mohannad, Nabki, Frederic, Sawan, Mohamad, El-Gamal, MouradYear:
2011
Language:
english
Pages:
5
DOI:
10.1109/icm.2011.6177338
File:
PDF, 1.40 MB
english, 2011