![](/img/cover-not-exists.png)
AlN/3C–SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators
Chih-Ming Lin, Yung-Yu Chen, Valery V. Felmetsger, Debbie G. Senesky, Albert P. PisanoVolume:
24
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/adma.201104842
File:
PDF, 555 KB
english, 2012