Flexible Control of Block Copolymer Directed Self-Assembly...

Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning

He Yi, Xin-Yu Bao, Jie Zhang, Christopher Bencher, Li-Wen Chang, Xiangyu Chen, Richard Tiberio, James Conway, Huixiong Dai, Yongmei Chen, Subhasish Mitra, H.-S. Philip Wong
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
24
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/adma.201200265
File:
PDF, 1.09 MB
english, 2012
Conversion to is in progress
Conversion to is failed