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Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning
He Yi, Xin-Yu Bao, Jie Zhang, Christopher Bencher, Li-Wen Chang, Xiangyu Chen, Richard Tiberio, James Conway, Huixiong Dai, Yongmei Chen, Subhasish Mitra, H.-S. Philip WongVolume:
24
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/adma.201200265
File:
PDF, 1.09 MB
english, 2012