Micromechanical Resonators: AlN/3C–SiC Composite Plate...

Micromechanical Resonators: AlN/3C–SiC Composite Plate Enabling High-Frequency and High-Q Micromechanical Resonators (Adv. Mater. 20/2012)

Chih-Ming Lin, Yung-Yu Chen, Valery V. Felmetsger, Debbie G. Senesky, Albert P. Pisano
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Volume:
24
Year:
2012
Pages:
1
DOI:
10.1002/adma.201290115
File:
PDF, 3.38 MB
2012
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