Thermal budget control for processes with spike-shaped...

Thermal budget control for processes with spike-shaped temperature profiles: Application to rapid thermal annealing

Jyh-Cheng Jeng, Bo-Chi Li
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Volume:
14
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/asjc.435
File:
PDF, 893 KB
english, 2012
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