Hysteresis Compensation and Adaptive Controller Design for a Piezoceramic Actuator System in Atomic Force Microscopy
Ping-Lang Yen, Mu-Tian Yan, Yil ChenVolume:
14
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/asjc.453
File:
PDF, 1.29 MB
english, 2012