Sulphur doped DLC films deposited by DC magnetron...

The Canadian Journal of Chemical Engineering 2012 Vol. 90; Iss. 4

Sulphur doped DLC films deposited by DC magnetron sputtering

Arunya Saeheng, Nattaporn Tonanon, Worawan Bhanthumnavin, Boonchoat Paosawatyanyong
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Volume:
90
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/cjce.21614
File:
PDF, 342 KB
english, 2012
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