Numerical study on double-frequency TMF in Cz silicon...

Numerical study on double-frequency TMF in Cz silicon growth

N. Dropka, Ch. Frank-Rotsch, P. Rudolph
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Volume:
47
Year:
2012
Language:
english
Pages:
8
DOI:
10.1002/crat.201100483
File:
PDF, 465 KB
english, 2012
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