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Numerical modelling of Czochralski growth of quadratic silicon crystals by means of a travelling magnetic field
W. Miller, Ch. Frank-Rotsch, M. Czupalla, P. RudolphVolume:
47
Year:
2012
Language:
english
Pages:
8
DOI:
10.1002/crat.201100494
File:
PDF, 610 KB
english, 2012