Silicon-Included Graphite Films Prepared by Thermally...

Chemical Vapor Deposition 2012 Vol. 18; Iss. 4-6

Silicon-Included Graphite Films Prepared by Thermally Induced CVD with a (C6F5)4Si Precursor

Vladimir V. Bakovets, Ludmila N. Zelenina, Tatiana M. Levashova, Evgeniy M. Uskov
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Volume:
18
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/cvde.201106929
File:
PDF, 317 KB
english, 2012
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