Atomic Layer Deposition of Copper Oxide using Copper(II)...

Chemical Vapor Deposition 2012 Vol. 18; Iss. 4-6

Atomic Layer Deposition of Copper Oxide using Copper(II) Acetylacetonate and Ozone

Mari Endresen Alnes, Edouard Monakhov, Helmer Fjellvåg, Ola Nilsen
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Volume:
18
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/cvde.201106959
File:
PDF, 401 KB
english, 2012
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