High-rate preparation of Co-Cr films on continuous tape...

Electronics and Communications in Japan (Part I: Communications)) 1984 Vol. 67; Iss. 12

High-rate preparation of Co-Cr films on continuous tape substrates via a targets-facing type sputtering method (TFTS-method)

Morito Matsuoka, Yoichi Hoshi, Masahiko Naoe, Shun'Ichi Yamanaka
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Volume:
67
Year:
1984
Language:
english
Pages:
10
DOI:
10.1002/ecja.4400671211
File:
PDF, 688 KB
english, 1984
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