A three-dimensional process simulator and its application...

A three-dimensional process simulator and its application to submicron VLSI's

Shinji Onga, Kenji Taniguchi
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Volume:
69
Year:
1986
Language:
english
Pages:
9
DOI:
10.1002/ecjb.4420690708
File:
PDF, 555 KB
english, 1986
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