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Evaluation of ion-implanted silicon substrate by photothermal deflection spectroscopy
Susumu Horita, Eiji Miyagoshi, Ken'Ichi Yago, Tomonobu HataVolume:
73
Year:
1990
Language:
english
Pages:
7
DOI:
10.1002/ecjb.4420730412
File:
PDF, 544 KB
english, 1990