Defect characterization and gettering effect in excimer...

Electronics and Communications in Japan (Part II: Electronics)) 1990 Vol. 73; Iss. 5

Defect characterization and gettering effect in excimer laser gettering

Akira Sakai, Yoshio Ohshita, Akihiko Ishitani, Kazumi Takemura, Fumitoshi Toyokawa, Masao Mikami
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Volume:
73
Year:
1990
Language:
english
Pages:
7
DOI:
10.1002/ecjb.4420730511
File:
PDF, 551 KB
english, 1990
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