An efficient screening method for DRAM memory cell...

An efficient screening method for DRAM memory cell capacitor dielectric

Kiyohiro Furutani, Makoto Suwa, Kazutami Arimoto, Koichiro Mashiko, Michihiro Yamada, Masatoshi Matsumoto
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Volume:
73
Year:
1990
Language:
english
Pages:
9
DOI:
10.1002/ecjb.4420731109
File:
PDF, 631 KB
english, 1990
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