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An efficient screening method for DRAM memory cell capacitor dielectric
Kiyohiro Furutani, Makoto Suwa, Kazutami Arimoto, Koichiro Mashiko, Michihiro Yamada, Masatoshi MatsumotoVolume:
73
Year:
1990
Language:
english
Pages:
9
DOI:
10.1002/ecjb.4420731109
File:
PDF, 631 KB
english, 1990