The oxidation process and dissipation factor of Al/Ta/Hf multilayered anodized thin-film capacitors
Tsuyoshi Dobashi, Toshiji Umezawa, Katsutaka Sasaki, Atsushi NoyaVolume:
77
Year:
1994
Language:
english
Pages:
8
DOI:
10.1002/ecjb.4420771207
File:
PDF, 622 KB
english, 1994