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Analysis of primary-on-slider ultrasonic piezoelectric actuators and experiments on multidegree of motion freedom plane actuator
Nobukazu Hoshi, Atsuo KawamuraVolume:
115
Year:
1995
Language:
english
Pages:
13
DOI:
10.1002/eej.4391150706
File:
PDF, 1.04 MB
english, 1995