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A study on the fabrication of rounded patterns by spin coating of photoresist on silicon substrate with microstructures
Jae Sung Yoon, Yeong-Eun Yoo, Doo-Sun ChoiVolume:
52
Year:
2012
Language:
english
Pages:
8
DOI:
10.1002/pen.22110
File:
PDF, 1.08 MB
english, 2012