Phosphorus gettering of iron by screen-printed emitters in monocrystalline Czochralski silicon wafers
Tobias M. Pletzer, Stephan Suckow, Elmar F. R. Stegemann, Horst Windgassen, Derk L. Bätzner, Heinrich KurzVolume:
aop
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/pip.2175
File:
PDF, 516 KB
english, 2012