Silicon Patterning Using Self-assembled PS-b-PAA Diblock...

Plasma Processes and Polymers 2012 Vol. aop; Iss. aop

Silicon Patterning Using Self-assembled PS-b-PAA Diblock Copolymer Masks for Black Silicon Fabrication via Plasma Etching

Xin Zhang, Andrei B. Sushkov, Christopher J. Metting, Sean Fackler, H. Dennis Drew, R. M. Briber
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Volume:
aop
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/ppap.201100198
File:
PDF, 720 KB
english, 2012
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