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Measurement of the Al content in AlGaN epitaxial layers by combined energy-dispersive X-ray and electron energy-loss spectroscopy in a transmission electron microscope
Houari Amari, Menno J. Kappers, Colin J. Humphreys, Caroline Chèze, Thomas WaltherVolume:
9
Year:
2012
Language:
english
Pages:
4
DOI:
10.1002/pssc.201100165
File:
PDF, 514 KB
english, 2012