Chlorine-free plasma-based vapour growth of GaN

physica status solidi (c) 2012 Vol. 9; Iss. 3-4

Chlorine-free plasma-based vapour growth of GaN

D. Siche, K. Kachel, R. Zwierz, S. Golka, A. Vodopyanov, I. Izotov, P. Sennikov, S. Golubev, K.-P. Franke, P. Sudhoff, D. Gogova
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Volume:
9
Year:
2012
Language:
english
Pages:
5
DOI:
10.1002/pssc.201100322
File:
PDF, 423 KB
english, 2012
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