Novel post-process for the passivation of a CMOS biosensor
M. Schindler, S. K. Kim, C. S. Hwang, C. Schindler, A. Offenhäusser, S. IngebrandtVolume:
2
Year:
2008
Language:
english
Pages:
3
DOI:
10.1002/pssr.200701242
File:
PDF, 205 KB
english, 2008