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Low-temperature growth of high quality AlN films on carbon face 6H-SiC
Myunghee Kim, Jitsuo Ohta, Atsushi Kobayashi, Hiroshi Fujioka, Masaharu OshimaVolume:
2
Year:
2008
Language:
english
Pages:
3
DOI:
10.1002/pssr.200701246
File:
PDF, 228 KB
english, 2008