Role of a-Si:H bulk in surface passivation of c-Si wafers

Role of a-Si:H bulk in surface passivation of c-Si wafers

A. Illiberi, K. Sharma, M. Creatore, M. C. M. van de Sanden
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Volume:
4
Year:
2010
Language:
english
Pages:
3
DOI:
10.1002/pssr.201004139
File:
PDF, 387 KB
english, 2010
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