Chloride-based CVD of 3C-SiC epitaxial layers on 6H(0001) SiC
Stefano Leone, Franziska C. Beyer, Anne Henry, Olof Kordina, Erik JanzénVolume:
4
Year:
2010
Language:
english
Pages:
3
DOI:
10.1002/pssr.201004271
File:
PDF, 383 KB
english, 2010