Patterned deposition by plasma enhanced spatial atomic...

physica status solidi (RRL) - Rapid Research Letters 2011 Vol. 5; Iss. 4

Patterned deposition by plasma enhanced spatial atomic layer deposition

Paul Poodt, Bas Kniknie, Annalisa Branca, Hans Winands, Fred Roozeboom
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Volume:
5
Year:
2011
Language:
english
Pages:
3
DOI:
10.1002/pssr.201004542
File:
PDF, 557 KB
english, 2011
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