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Electromigration in ALCu interconnections with W-plug contacts
L. Ferlazzo, G. Reimbold, J. P. Gonchond, M. Heitzmann, O. Demolliens, G. LormandVolume:
9
Year:
1993
Language:
english
Pages:
4
DOI:
10.1002/qre.4680090410
File:
PDF, 384 KB
english, 1993