A concurrent pattern operation algorithm for VLSI mask data
Akira Tsukizoe, Tokinori Kozawa, Jun'Ya Sakemi, Chihei Miura, Tatsuki IshiiVolume:
18
Year:
1987
Language:
english
Pages:
11
DOI:
10.1002/scj.4690180210
File:
PDF, 858 KB
english, 1987