Non-contact evaluation of the electrical conductivity of...

Non-contact evaluation of the electrical conductivity of thin metallic films by eddy current microscopy

Hironori Tohmyoh, Shoho Ishikawa, Mikio Muraoka
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Volume:
44
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/sia.5005
File:
PDF, 254 KB
english, 2012
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