Development of gas cluster ion beam irradiation system with...

Development of gas cluster ion beam irradiation system with an orthogonal acceleration TOF instrument

K. Ichiki, J. Tamura, T. Seki, T. Aoki, J. Matsuo
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Volume:
aop
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/sia.5092
File:
PDF, 143 KB
english, 2012
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