Oxygen accumulation effect for depth profiling of thin-multilayered sample using low-energy oxygen ion beam
Suguru Nishinomiya, Naoyoshi Kubota, Shun-ichi Hayashi, Hisataka TakenakaVolume:
aop
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/sia.5107
File:
PDF, 245 KB
english, 2012