Calibration correction of ultra low energy SIMS profiles...

Surface and Interface Analysis 2012 Vol. aop; Iss. aop

Calibration correction of ultra low energy SIMS profiles based on MEIS analysis of shallow arsenic implants in silicon

E. Demenev, D. Giubertoni, M. A. Reading, P. Bailey, T. C. Q. Noakes, M. Bersani, J. A. van den Berg
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Volume:
aop
Year:
2012
Language:
english
Pages:
1
DOI:
10.1002/sia.5136
File:
PDF, 909 KB
english, 2012
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