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The Kinetics and Mechanism of the Pyrolysis of Manganese and Manganese Silicide CVD Precursors
Douglas K. Russell, Iain M. T. Davidson, Andrew M. Ellis, Graham P. Mills, Mark Pennington, Ian M. Povey, J. Barrie Raynor, Sinan SaydamVolume:
4
Year:
1998
Language:
english
Pages:
1
DOI:
10.1002/(sici)1521-3862(199805)04:033.0.co;2-h
File:
PDF, 221 KB
english, 1998